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T. Morel; S. Bamola; R. Ramos; A. Beaurain; E. Pargon; O. Joubert. (2008). Tungsten metal gate etching in Cl[sub 2]∕O[sub 2] inductively coupled high density plasmas. , (), –. doi:10.1116/1.3002392 

An interview with Sci-Hub Founder Alexandra Elbakyan,Who exactly should pay for academic research